NAINSOL / Platina 200

6" wafer compatible, shower-head type reactor

RF Plasma

Chalcogenide / Oxychalcogenide Materials

JEHARA / JPEALD

8" wafer compatible, shower-head type, CVD-ready blockerplate

RF Plasma

Oxide Materials

MKS / V2000-C

1-300 amu

Dual detector system (Faraday and Secondary Electron Multiplier)

Detection limit: (Partial pressure) < 2E-11 Torr, (Concentration) < 15 ppb

Agilent Technology / 81130A

400/660 MHz Pulse / Pattern generation